6 inch Vacuum Triaxial Chuck
Microscope: 80X, 250X, 800X, 2,000X (선택)
X/y Stage Micro Motion Control
Z Statge Micrometer Control
Noise Level: ~ 50 fA 이하
Vacuum Pump: 전용 저소음
Probe Tip: 0.5um, 0.3um