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New Chamber Probe station ³ª¿Ô½À´Ï´Ù_2010³â Version
2009-12-15 10:51:43
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Chamber_MST5000_cc.JPG (2767039 Bytes)
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MS TECH ±è¸í¼ö ÀÔ´Ï´Ù
New Chamber Probe station ³ª¿Ô½À´Ï´Ù_2010³â Version
================================================
Vacuum : 10(-3), 10(-6)
Temp : (+) 150 ~ (-170) Dgree c
Leakage : ~ 50 fA Less than
Probe Accuracy : 1um less than
Work Travel : 30mm
================================================
Cooling 4 Kelvin Àº º°µµ ÇùÀÇ ¿ä¸Á (2010 ³â °³¹ß¿¹Á¤)
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New Chamber Probe station ³ª¿Ô½À´Ï´Ù_2010³â Version
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